
Description
UV CureConfiguration
No ConfigurationOEM Model Description
The Fusion M150 is a photoresist stabilization tool used for deep UV flood exposure and features a 150mm heated/water cooled wafer chuck.Documents
No documents
Verified
CATEGORY
UV-Curing
Last Verified: 17 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
155638
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
AXCELIS / FUSION
M150
CATEGORY
UV-Curing
Last Verified: 17 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
155638
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
UV CureConfiguration
No ConfigurationOEM Model Description
The Fusion M150 is a photoresist stabilization tool used for deep UV flood exposure and features a 150mm heated/water cooled wafer chuck.Documents
No documents