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AXCELIS / FUSION FUSION PS3
  • AXCELIS / FUSION FUSION PS3
  • AXCELIS / FUSION FUSION PS3
  • AXCELIS / FUSION FUSION PS3
Description
CURE , DUAL CHAMBER
Configuration
No Configuration
OEM Model Description
The FusionPS3 is a 300mm photostabilization system designed for photoresist curing, low-k curing, and non-volatile memory charge erasure. It supports the integration of advanced materials into mainstream device production and maximizes intermolecular reactions to deliver consistent and stable resist characteristics. The FusionPS3 incorporates leading-edge photoresist curing capabilities in a unique, dual-chamber platform, enabling simultaneous processing of different recipes. It guarantees maximum machine uptime, high productivity, and lower cost of ownership, meeting the stringent requirements of 300mm production capability.
Documents

No documents

CATEGORY
UV-Curing

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

101690


Wafer Sizes:

Unknown


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

AXCELIS / FUSION

FUSION PS3

verified-listing-icon
Verified
CATEGORY
UV-Curing
Last Verified: Over 60 days ago
listing-photo-4fdcb3098f3e447c9f77f95c71f827f2-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

101690


Wafer Sizes:

Unknown


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
CURE , DUAL CHAMBER
Configuration
No Configuration
OEM Model Description
The FusionPS3 is a 300mm photostabilization system designed for photoresist curing, low-k curing, and non-volatile memory charge erasure. It supports the integration of advanced materials into mainstream device production and maximizes intermolecular reactions to deliver consistent and stable resist characteristics. The FusionPS3 incorporates leading-edge photoresist curing capabilities in a unique, dual-chamber platform, enabling simultaneous processing of different recipes. It guarantees maximum machine uptime, high productivity, and lower cost of ownership, meeting the stringent requirements of 300mm production capability.
Documents

No documents