Description
CURE , DUAL CHAMBERConfiguration
No ConfigurationOEM Model Description
The FusionPS3 is a 300mm photostabilization system designed for photoresist curing, low-k curing, and non-volatile memory charge erasure. It supports the integration of advanced materials into mainstream device production and maximizes intermolecular reactions to deliver consistent and stable resist characteristics. The FusionPS3 incorporates leading-edge photoresist curing capabilities in a unique, dual-chamber platform, enabling simultaneous processing of different recipes. It guarantees maximum machine uptime, high productivity, and lower cost of ownership, meeting the stringent requirements of 300mm production capability.Documents
No documents
AXCELIS / FUSION
FUSION PS3
Verified
CATEGORY
UV-Curing
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
101690
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
AXCELIS / FUSION
FUSION PS3
CATEGORY
UV-Curing
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
101690
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
CURE , DUAL CHAMBERConfiguration
No ConfigurationOEM Model Description
The FusionPS3 is a 300mm photostabilization system designed for photoresist curing, low-k curing, and non-volatile memory charge erasure. It supports the integration of advanced materials into mainstream device production and maximizes intermolecular reactions to deliver consistent and stable resist characteristics. The FusionPS3 incorporates leading-edge photoresist curing capabilities in a unique, dual-chamber platform, enabling simultaneous processing of different recipes. It guarantees maximum machine uptime, high productivity, and lower cost of ownership, meeting the stringent requirements of 300mm production capability.Documents
No documents