Description
The tool has been kept under vacuum since it was pulled out of service. It has a cryo pump from 2016, and is a 2009 e-beam tool with 4 pockets. The software is live and active as well as the PLC for the tool. The tool also comes with a cryo compressor as well. The only part that is missing is the mechanical pump.Configuration
This tool was used mostly for metallization for lift off - Cr, Ti, and Au.OEM Model Description
None ProvidedDocuments
No documents
KURT J LESKER
PVD 75
Verified
CATEGORY
Thin Film / Film Thickness
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
106800
Wafer Sizes:
Unknown
Vintage:
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KURT J LESKER
PVD 75
CATEGORY
Thin Film / Film Thickness
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
106800
Wafer Sizes:
Unknown
Vintage:
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
The tool has been kept under vacuum since it was pulled out of service. It has a cryo pump from 2016, and is a 2009 e-beam tool with 4 pockets. The software is live and active as well as the PLC for the tool. The tool also comes with a cryo compressor as well. The only part that is missing is the mechanical pump.Configuration
This tool was used mostly for metallization for lift off - Cr, Ti, and Au.OEM Model Description
None ProvidedDocuments
No documents