Description
Automated handler, 200mm, Open HandlerConfiguration
No ConfigurationOEM Model Description
The Tencor FLX-5400 is an automated wafer handling system that uses patented dual wavelength technology to create 2D and 3D maps of radial stress. It has a unique calibration algorithm and automatic substrate thickness determination for enhanced measurement accuracy.Documents
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KLA
FLX 5400
CATEGORY
Thin Film / Film Thickness
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
46411
Wafer Sizes:
8"/200mm
Vintage:
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Automated handler, 200mm, Open HandlerConfiguration
No ConfigurationOEM Model Description
The Tencor FLX-5400 is an automated wafer handling system that uses patented dual wavelength technology to create 2D and 3D maps of radial stress. It has a unique calibration algorithm and automatic substrate thickness determination for enhanced measurement accuracy.Documents
No documents