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Marketplace > Thin Film / Film Thickness > KLA > FLX 5400
KLA

FLX 5400

Category
Thin Film / Film Thickness
Overview

The Tencor FLX-5400 is an automated wafer handling system that uses patented dual wavelength technology to create 2D and 3D maps of radial stress. It has a unique calibration algorithm and automatic substrate thickness determination for enhanced measurement accuracy.

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