Description

Module: Metrology

Configuration

No Configuration

OEM Model Description

The ASET-F5x is a thin film metrology system that can measure materials across a continuous wavelength spectrum from 190 nm to 800 nm. It accurately measures complex multi-layer thin film stacks using spectroscopic ellipsometry and precisely measures advanced, ultra-thin gate dielectric films. It provides the accuracy, repeatability, and system-to-system matching required to monitor advanced ICs with geometries as small as 0.1 micron. Its applications include diffusion films/film deposition, CMP, lithography, and etch.

Documents

KLA ASET-F5x.pdf

KLA

ASET-F5x

Verified

Thin Film / Film Thickness

Last Verified: 9 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

136403

Wafer Sizes:

12"/300mm

Vintage:

2005

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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