Description
Software Version - Summit 4.9 CIM - SECs/GEM Process - Thickness Film MeasurementConfiguration
Factory Interface - FOUP - Quantity- 2 Handler System - ASYST S3OEM Model Description
The ASET-F5x is a thin film metrology system that can measure materials across a continuous wavelength spectrum from 190 nm to 800 nm. It accurately measures complex multi-layer thin film stacks using spectroscopic ellipsometry and precisely measures advanced, ultra-thin gate dielectric films. It provides the accuracy, repeatability, and system-to-system matching required to monitor advanced ICs with geometries as small as 0.1 micron. Its applications include diffusion films/film deposition, CMP, lithography, and etch.Documents
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KLA
ASET-F5x
CATEGORY
Thin Film / Film Thickness
Last Verified: 10 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
150567
Wafer Sizes:
12"/300mm
Vintage:
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Software Version - Summit 4.9 CIM - SECs/GEM Process - Thickness Film MeasurementConfiguration
Factory Interface - FOUP - Quantity- 2 Handler System - ASYST S3OEM Model Description
The ASET-F5x is a thin film metrology system that can measure materials across a continuous wavelength spectrum from 190 nm to 800 nm. It accurately measures complex multi-layer thin film stacks using spectroscopic ellipsometry and precisely measures advanced, ultra-thin gate dielectric films. It provides the accuracy, repeatability, and system-to-system matching required to monitor advanced ICs with geometries as small as 0.1 micron. Its applications include diffusion films/film deposition, CMP, lithography, and etch.Documents
No documents