Description
Metrology (Bow, Thickness, TTV) SMIF: 2x Brooks Verrsaport 2200 Loadports (Fortrend not supported) SEMI E84 compatible Wafer Handling: GaAs, Si, Sapphire with +/- 200 µm Bow and 4 mm Thickness Different Wafer cassettes (13 / 25 slot) possible Prealigner, OCR Reader CWL 3 mm (Wafer Bow, Wafer Thickness) WLI / CFM OT (Chip Topography) IRT 80 (Film Thickness) FTR UV-VIS-NIR (Thin Film Thickness) MTBF / MTBA / MTTR / Uptime: > 500 h / 50 h / 4 h / > 95 %Configuration
Wafer Bow, EPI Thickness, TTVOEM Model Description
None ProvidedDocuments
FRT
MICROPROF
CATEGORY
Thin Film / Film Thickness
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
142372
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available