Description
• High throughput due to fast cycling, load-lockdesign • Better reproducibility and higher yields because of complete programmed sequencing • Improved step coverage with 2R source-to-substrate spacing • Single dome for lift-off processes • Minimized EIB source and substrate heater contamination since lower chamber is isolated • Clean, convenient operation in laminar flow hood because of low profile construction • Canted-dome planetary fixturing possible in full capacity chamber • Manual semiautomatic or fully automatic operation due to modular systems designs • Multimetal deposition capability with optional sources Temescal Technical Engineering Services (T.E.S.) TES FC-1800 Load Locked E-Beam EvaporatorConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
Verified
CATEGORY
Thermal Evaporators
Last Verified: 19 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
138625
Wafer Sizes:
4"/100mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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FERROTEC / TEMESCAL
FC 1800
CATEGORY
Thermal Evaporators
Last Verified: 19 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
138625
Wafer Sizes:
4"/100mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
• High throughput due to fast cycling, load-lockdesign • Better reproducibility and higher yields because of complete programmed sequencing • Improved step coverage with 2R source-to-substrate spacing • Single dome for lift-off processes • Minimized EIB source and substrate heater contamination since lower chamber is isolated • Clean, convenient operation in laminar flow hood because of low profile construction • Canted-dome planetary fixturing possible in full capacity chamber • Manual semiautomatic or fully automatic operation due to modular systems designs • Multimetal deposition capability with optional sources Temescal Technical Engineering Services (T.E.S.) TES FC-1800 Load Locked E-Beam EvaporatorConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents