FERROTEC / TEMESCAL

FC 1800

Airco Temescal FC-1800 Evaporator System (Complete Working System), Airco Temescal Power Supply CV-14, CTI-Cryopump 8, Varian Vacuum Pump Model EXPPTS06003, CTI-Cryogenics Compressor Model SC

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• High throughput due to fast cycling, load-lockdesign
• Better reproducibility and higher yields because of complete programmed sequencing
• Improved step coverage with 2R source-to-substrate spacing
• Single dome for lift-off processes
• Minimized EIB source and substrate heater contamination since lower chamber is isolated
• Clean, convenient operation in laminar flow hood because of low profile construction

• Canted-dome planetary fixturing possible in full capacity chamber
• Manual semiautomatic or fully automatic operation due to modular systems designs
• Multimetal deposition capability with optional sources

Temescal Technical Engineering Services (T.E.S.) TES FC-1800 Load Locked E-Beam Evaporator



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FC-1800 VACUUM SYSTEM

Load Locked 18” Diameter Chamber

New touch screen valve controller 

Rebuilt dual stage vacuum pump   

CTI Cryo Pump (Rebuilt)

CTI Compressor and Lines

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FC 1800

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FERROTEC / TEMESCAL

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FERROTEC / TEMESCAL

FC 1800

FERROTEC / TEMESCAL

FC 1800

FERROTEC / TEMESCAL

FC 1800

FERROTEC / TEMESCAL

FC 1800