NSR-S204B
Category
Steppers & ScannersOverview
The system offers a resolution of 150 nm or better with a numerical aperture (NA) of 0.68. It utilizes a KrF excimer laser with a wavelength of 248 nm as the exposure light source. The reduction ratio is 1:4, and the exposure field measures 25 × 33 mm. The alignment accuracy, using the EGA method with |M| + 3σ, is equal to or less than 35 nm.
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10
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NIKON
NSR-S204B
Steppers & ScannersVintage: Condition: UsedLast Verified7 days agoNIKON
NSR-S204B
Steppers & ScannersVintage: Condition: RefurbishedLast VerifiedOver 60 days agoNIKON
NSR-S204B
Steppers & ScannersVintage: 2001Condition: UsedLast VerifiedOver 60 days agoNIKON
NSR-S204B
Steppers & ScannersVintage: Condition: UsedLast VerifiedOver 60 days ago
NIKON
NSR-S204B
Steppers & ScannersVintage: Condition: UsedLast VerifiedOver 60 days agoNIKON
NSR-S204B
Steppers & ScannersVintage: Condition: UsedLast VerifiedOver 60 days agoNIKON
NSR-S204B
Steppers & ScannersVintage: Condition: UsedLast VerifiedOver 60 days agoNIKON
NSR-S204B
Steppers & ScannersVintage: 2000Condition: UsedLast VerifiedOver 60 days ago