Description
Lens Data IU Flare = 0.84% Lens Flare = 8.50% Uniformity = 6.00% Power = 541 mW/cm2 Total Focus Deviation = 0.202 µm Astigmatism = 0.119 µm Coma = 0.040 µm Iso DOF = .275 µm Photolithography Scanner 248nm Software Version - MCSV CIM - SECS Excluded Items List (Pumps, Chillers & Abatement are all excluded)Configuration
Handler System: WL Type 3 Factory Interface: Open CassetteOEM Model Description
Stepper. NSR-S203B (resolution ≦ 180 nm). Ability to mass manufacture ICs with ultra-high-precision circuitry–specifically, sub-0.18µm minimum-pattern linewidth.Documents
Similar Listings
View All
NIKON
NSR-S203B
CATEGORY
Steppers & Scanners
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
133519
Wafer Sizes:
8"/200mm
Vintage:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available