Description
Nikon i-line steppers use a 365nm wavelength light source and are precision manufacturing equipment used for fine pattern transfer in semiconductor manufacturing. The main models include the NSR series (steppers) and SF series (scanners), which support multiple wafer sizes, including 2, 4, 6, 8, and 12-inch wafers. They are widely used in wafer production, making them suitable for semiconductor production lines of different scales and diverse production needs.Configuration
Type - Stepper Resolution (μm) - 0.50 N.A. - 0.50 Magnification - 5:1 Max Field (mm) - 20*20 Overlay Accuracy (nm) - LSA:120 FIA:130OEM Model Description
The Model NSR-2005i8A is an i-line stepper designed for mass producing large die size, half micron devices. With a 6 in. reticle, it can generate three 16Mb DRAM chips in a single exposure. The exposure area is 15.9 mm x 25.2 mm with 6 in. reticles and 20 mm x 20 mm with 5 in. reticles. It is fully compatible with Nikon Precision Inc.'s NSR-1505/1755 Series steppers for existing customers.Documents
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Verified
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
131718
Wafer Sizes:
2"/50mm, 4"/100mm, 6"/150mm, 8"/200mm, 12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-2005i8A
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
131718
Wafer Sizes:
2"/50mm, 4"/100mm, 6"/150mm, 8"/200mm, 12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Nikon i-line steppers use a 365nm wavelength light source and are precision manufacturing equipment used for fine pattern transfer in semiconductor manufacturing. The main models include the NSR series (steppers) and SF series (scanners), which support multiple wafer sizes, including 2, 4, 6, 8, and 12-inch wafers. They are widely used in wafer production, making them suitable for semiconductor production lines of different scales and diverse production needs.Configuration
Type - Stepper Resolution (μm) - 0.50 N.A. - 0.50 Magnification - 5:1 Max Field (mm) - 20*20 Overlay Accuracy (nm) - LSA:120 FIA:130OEM Model Description
The Model NSR-2005i8A is an i-line stepper designed for mass producing large die size, half micron devices. With a 6 in. reticle, it can generate three 16Mb DRAM chips in a single exposure. The exposure area is 15.9 mm x 25.2 mm with 6 in. reticles and 20 mm x 20 mm with 5 in. reticles. It is fully compatible with Nikon Precision Inc.'s NSR-1505/1755 Series steppers for existing customers.Documents
No documents