Description
● Resolution: 0.5μm ● Computer Type: PDP11 ● Reticle Size: 5inch ● Field Sizes: 15 / 17.5 / 20mm ● Wafer Size: 6” Flat ● Reticle Libraries: 1 ● Wafer Loader: Type 1 ● Wafer Loader prealignment 2: Yes ● Barcode Reader: Yes ● Wafer Loader Indexers: 2 ● FIA: Yes ● LSA: Yes ● LIA: Yes ● Autofocus: Single Point ● Levelling: Yes ● Chuck Type: Ceramic ring chuck ● Wafer Stage Ballscrew ● MCS2 Version: 2.4B ● PPD: NoConfiguration
Resolution: 0.5um Reduction ratio: 5;1 Exposure field: 15.175 & 20mm Alignment accuracy: < 110nm Wafer size: 6 inch just now but can go to 3,4,5,8 inch if required.OEM Model Description
The Model NSR-2005i8A is an i-line stepper designed for mass producing large die size, half micron devices. With a 6 in. reticle, it can generate three 16Mb DRAM chips in a single exposure. The exposure area is 15.9 mm x 25.2 mm with 6 in. reticles and 20 mm x 20 mm with 5 in. reticles. It is fully compatible with Nikon Precision Inc.'s NSR-1505/1755 Series steppers for existing customers.Documents
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NIKON
NSR-2005i8A
Verified
CATEGORY
Steppers & Scanners
Last Verified: 8 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
115160
Wafer Sizes:
6"/150mm
Vintage:
1991
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-2005i8A
CATEGORY
Steppers & Scanners
Last Verified: 8 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
115160
Wafer Sizes:
6"/150mm
Vintage:
1991
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
● Resolution: 0.5μm ● Computer Type: PDP11 ● Reticle Size: 5inch ● Field Sizes: 15 / 17.5 / 20mm ● Wafer Size: 6” Flat ● Reticle Libraries: 1 ● Wafer Loader: Type 1 ● Wafer Loader prealignment 2: Yes ● Barcode Reader: Yes ● Wafer Loader Indexers: 2 ● FIA: Yes ● LSA: Yes ● LIA: Yes ● Autofocus: Single Point ● Levelling: Yes ● Chuck Type: Ceramic ring chuck ● Wafer Stage Ballscrew ● MCS2 Version: 2.4B ● PPD: NoConfiguration
Resolution: 0.5um Reduction ratio: 5;1 Exposure field: 15.175 & 20mm Alignment accuracy: < 110nm Wafer size: 6 inch just now but can go to 3,4,5,8 inch if required.OEM Model Description
The Model NSR-2005i8A is an i-line stepper designed for mass producing large die size, half micron devices. With a 6 in. reticle, it can generate three 16Mb DRAM chips in a single exposure. The exposure area is 15.9 mm x 25.2 mm with 6 in. reticles and 20 mm x 20 mm with 5 in. reticles. It is fully compatible with Nikon Precision Inc.'s NSR-1505/1755 Series steppers for existing customers.Documents
No documents