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Model : NSR-2205i11D • Temprature: 23°C • Chamber Type :ASAHI N2B-B • NA Variable System : Yes • Reticle Size : 6“(normal) • Reticle microscope : Fix • MAX Field Size : 22mm • PPD : No • Reticle Barcode Reader : No (on RETICLE) • Reticle SMIF : No • Extend R-Library : No • Reticle Case : 6“ ⚫ Wafer : Flat 4” (8inch Notch) ⚫ Pre Alignment2 : Yes ⚫ Wafer Loader : Type2 ⚫ Chip Leveling : Yes ⚫ In-Line : No ⚫ Wafer Carrier Table : Left,Right ⚫ Alignment sensor : LSA, FIA ⚫ Rack Type : Right i12 Type Rack) ⚫ Body-OP Ruck cable : 3m(normal) ⚫ Wafer edge Exposure : No ⚫ Lamp Power : 1.75Kw(Normal) ⚫ Illumination : SHRINC1 ⚫ Signal Tower : NoOEM Model Description
The Nikon NSR-2205i11D is a step-and-repeat scanning system with a resolution of 350nm or better and a NA of 0.63. It uses an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy is 70nm or better and the alignment system is LSA (standard), FIA (optional), LIA (optional). I hope that helps! Let me know if you have any other questions.Documents
Verified
CATEGORY
Steppers & Scanners
Last Verified: 29 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
132909
Wafer Sizes:
8"/200mm
Vintage:
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-2005i11D
CATEGORY
Steppers & Scanners
Last Verified: 29 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
132909
Wafer Sizes:
8"/200mm
Vintage:
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available