Description
Exterior Dimensions Width 74.803 in (190.0 cm) Depth 98.425 in (250.0 cm) Height 102.362 in (260.0 cm) Weight 12,787 lb (5,800 kg)Configuration
No ConfigurationOEM Model Description
The Canon FPA-3000EX5 is a high throughput excimer-laser stepper designed for critical layer mass production of 64Mb and 256Mb DRAMs and next-generation microprocessors. It offers a 23% higher throughput than its predecessor, the EX4, with a throughput of more than 90 wafers per hour. It has the industry’s best optical performance and maintains compatibility with existing Canon 5x i-line step-and-repeat tools. The EX5 has a newly designed projection lens with a numerical aperture (NA) of 0.63 and 0.22µm resolution in an exposure area of 22mm x 22mm. It also has an on-the-fly focusing system, an improved advanced global alignment (AGA) scheme, and a high-output Cymer 5000 series excimer laser source. The FPA-3000EX5 stepper shares many of the same technology innovations as other models in Canon’s i-line stepper family, making it an efficient mix-and-match partner with existing critical-layer and rough-layer steppers.Documents
No documents
Verified
CATEGORY
Steppers & Scanners
Last Verified: Today
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
142287
Wafer Sizes:
8"/200mm
Vintage:
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
CANON
FPA-3000EX5
CATEGORY
Steppers & Scanners
Last Verified: Today
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
142287
Wafer Sizes:
8"/200mm
Vintage:
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Exterior Dimensions Width 74.803 in (190.0 cm) Depth 98.425 in (250.0 cm) Height 102.362 in (260.0 cm) Weight 12,787 lb (5,800 kg)Configuration
No ConfigurationOEM Model Description
The Canon FPA-3000EX5 is a high throughput excimer-laser stepper designed for critical layer mass production of 64Mb and 256Mb DRAMs and next-generation microprocessors. It offers a 23% higher throughput than its predecessor, the EX4, with a throughput of more than 90 wafers per hour. It has the industry’s best optical performance and maintains compatibility with existing Canon 5x i-line step-and-repeat tools. The EX5 has a newly designed projection lens with a numerical aperture (NA) of 0.63 and 0.22µm resolution in an exposure area of 22mm x 22mm. It also has an on-the-fly focusing system, an improved advanced global alignment (AGA) scheme, and a high-output Cymer 5000 series excimer laser source. The FPA-3000EX5 stepper shares many of the same technology innovations as other models in Canon’s i-line stepper family, making it an efficient mix-and-match partner with existing critical-layer and rough-layer steppers.Documents
No documents