Description

No description

Configuration

No Configuration

OEM Model Description

FPA-2500i3 i-line stepper, 0.6 NA, 20mm x 20mm field, 44 wafers per hour, targeted at 64Mb DRAM Numerical Aperture: 0.60 / 0.52 Image Field: 20 mm [(X)11.14mm x (Y)26mm) Printing Wavelength: i-line (365 nm) Resolution:0.40μm Illumination Lamp: 1.5 kW super-high-pressure mercury lamp Illumination Uniformity: < ±1.2 % Current Wafer Size: 6”(4”, 5” and 8” Sizes Available) Magnification: X 1/5

Documents

FPA-2500i3 Spec.pdf

CANON

FPA-2500i3

Verified

Steppers & Scanners

Last Verified: Yesterday

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

144410

Wafer Sizes:

Unknown

Vintage:

1996

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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