Description
No descriptionConfiguration
Configuration: -Electrical 3Ø AC 200V 50/60Hz -Rated power 18.7 KVA -Reticle Size 5", Canon STD -Wafer Feeder Type-L -PA Unit 6", O.F Type -Chamber TBW-CD73 -Illuminator FPA-2500 i line -Console version V 5.20A -A Scope i-line, TTL -Θ/Z-Tilt Unit Piezo Stack 3 (L,M,R) -Support Mount Servo Passive Damper 4 -Lamp House 1.5KW 1 -No Missing PartOEM Model Description
FPA-2500i3 i-line stepper, 0.6 NA, 20mm x 20mm field, 44 wafers per hour, targeted at 64Mb DRAM Numerical Aperture: 0.60 / 0.52 Image Field: 20 mm [(X)11.14mm x (Y)26mm) Printing Wavelength: i-line (365 nm) Resolution:0.40μm Illumination Lamp: 1.5 kW super-high-pressure mercury lamp Illumination Uniformity: < ±1.2 % Current Wafer Size: 6”(4”, 5” and 8” Sizes Available) Magnification: X 1/5Documents
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CANON
FPA-2500i3
Verified
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
15334
Wafer Sizes:
6"/150mm
Vintage:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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CANON
FPA-2500i3
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
15334
Wafer Sizes:
6"/150mm
Vintage:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Configuration: -Electrical 3Ø AC 200V 50/60Hz -Rated power 18.7 KVA -Reticle Size 5", Canon STD -Wafer Feeder Type-L -PA Unit 6", O.F Type -Chamber TBW-CD73 -Illuminator FPA-2500 i line -Console version V 5.20A -A Scope i-line, TTL -Θ/Z-Tilt Unit Piezo Stack 3 (L,M,R) -Support Mount Servo Passive Damper 4 -Lamp House 1.5KW 1 -No Missing PartOEM Model Description
FPA-2500i3 i-line stepper, 0.6 NA, 20mm x 20mm field, 44 wafers per hour, targeted at 64Mb DRAM Numerical Aperture: 0.60 / 0.52 Image Field: 20 mm [(X)11.14mm x (Y)26mm) Printing Wavelength: i-line (365 nm) Resolution:0.40μm Illumination Lamp: 1.5 kW super-high-pressure mercury lamp Illumination Uniformity: < ±1.2 % Current Wafer Size: 6”(4”, 5” and 8” Sizes Available) Magnification: X 1/5Documents
No documents