PAS 2000
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Steppers & ScannersOverview
PAS 2000 is a fully automatic wafer stepper created to produce the maximum possible die per wafer with rapid throughput and sustain uptime - factors vital to efficient production of integrated circuits. Offering high exposure speeds and fast throughput at a CD between 1.0 and 1.3 micron along with an overlay accuracy of 0.25 micron.
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