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6" Fab For Sale from Moov - Click Here to Learn More

ASML PAS 5500/300C

Description

DUV Stepper - Lens Unit Cables and Panels only ***Photos are of Work Station, Lens, Covers and Cables***

Configuration

DUV Stepper - Lens Unit only

OEM Model Description

The PAS 5500/300C is a DUV wafer stepper made by ASML. It is part of the PAS 5500 platform, which has been a ground-breaking lithography platform for ASML and has been in use for over 30 years. The PAS 5500/300C is a step and repeat exposure system with laser-controlled stage motion. It uses a Zeiss lens with a variable N.A. of 0.63 - 0.40 and a DUV (248 nm) exposure wavelength. It has programmable annular illumination modes and a field size of 22 x 22 mm. It also has 3D-Align backside alignment.

Documents

No documents

ASML

PAS 5500/300C

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Verified

CATEGORY

Steppers & Scanners

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

59201

Wafer Sizes:

8"/200mm

Vintage:

Unknown

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Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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ASML PAS 5500/300C

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PAS 5500/300C

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Last VerifiedOver 60 days ago

ASML PAS 5500/300C

ASML

PAS 5500/300C

Steppers & Scanners

Vintage: 0Condition: Used

Last VerifiedOver 60 days ago

ASML

PAS 5500/300C

verified-listing-icon

Verified

CATEGORY

Steppers & Scanners

Last Verified: Over 60 days ago

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

59201

Wafer Sizes:

8"/200mm

Vintage:

Unknown

Have Additional Questions?

Logistics Support

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Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

DUV Stepper - Lens Unit Cables and Panels only ***Photos are of Work Station, Lens, Covers and Cables***

Configuration

DUV Stepper - Lens Unit only

OEM Model Description

The PAS 5500/300C is a DUV wafer stepper made by ASML. It is part of the PAS 5500 platform, which has been a ground-breaking lithography platform for ASML and has been in use for over 30 years. The PAS 5500/300C is a step and repeat exposure system with laser-controlled stage motion. It uses a Zeiss lens with a variable N.A. of 0.63 - 0.40 and a DUV (248 nm) exposure wavelength. It has programmable annular illumination modes and a field size of 22 x 22 mm. It also has 3D-Align backside alignment.

Documents

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