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ASML PAS 5500/300C

Description

Stepper

Configuration

248nm

OEM Model Description

The PAS 5500/300C is a DUV wafer stepper made by ASML. It is part of the PAS 5500 platform, which has been a ground-breaking lithography platform for ASML and has been in use for over 30 years. The PAS 5500/300C is a step and repeat exposure system with laser-controlled stage motion. It uses a Zeiss lens with a variable N.A. of 0.63 - 0.40 and a DUV (248 nm) exposure wavelength. It has programmable annular illumination modes and a field size of 22 x 22 mm. It also has 3D-Align backside alignment.

Documents

asml_.txt

asml.txt

ASML

PAS 5500/300C

verified-listing-icon

Verified

CATEGORY

Steppers & Scanners

Last Verified: 6 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

145545

Wafer Sizes:

Unknown

Vintage:

1998

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Similar Listings

ASML PAS 5500/300C

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ASML PAS 5500/300C

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PAS 5500/300C

Steppers & Scanners

Vintage: 0Condition: Used

Last VerifiedOver 60 days ago

ASML

PAS 5500/300C

verified-listing-icon

Verified

CATEGORY

Steppers & Scanners

Last Verified: 6 days ago

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

145545

Wafer Sizes:

Unknown

Vintage:

1998

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

Stepper

Configuration

248nm

OEM Model Description

The PAS 5500/300C is a DUV wafer stepper made by ASML. It is part of the PAS 5500 platform, which has been a ground-breaking lithography platform for ASML and has been in use for over 30 years. The PAS 5500/300C is a step and repeat exposure system with laser-controlled stage motion. It uses a Zeiss lens with a variable N.A. of 0.63 - 0.40 and a DUV (248 nm) exposure wavelength. It has programmable annular illumination modes and a field size of 22 x 22 mm. It also has 3D-Align backside alignment.

Documents

asml_.txt

asml.txt

Similar Listings

ASML PAS 5500/300C

ASML

PAS 5500/300C

Steppers & ScannersVintage: 1998Condition: UsedLast Verified:6 days ago

ASML PAS 5500/300C

ASML

PAS 5500/300C

Steppers & ScannersVintage: 0Condition: UsedLast Verified:Over 60 days ago

ASML PAS 5500/300C

ASML

PAS 5500/300C

Steppers & ScannersVintage: 0Condition: UsedLast Verified:Over 60 days ago

ASML PAS 5500/300C

ASML

PAS 5500/300C

Steppers & ScannersVintage: 0Condition: UsedLast Verified:Over 60 days ago