Description
i-Line StepperConfiguration
No ConfigurationOEM Model Description
The PAS 5500/200B is the first stepper to incorporate ASML's revolutionary AERIALTM illuminator, a versatile component that provides both the flexibility to switch between conventional and off-axis illumination modes and the high intensity to enable economical mass production of next-generation devices. The i-line stepper combines 0.35 micron resolution with industry-leading overlay performance of 50nm, or 100nm in machine-to-machine matching.Documents
No documents
Verified
CATEGORY
Steppers & Scanners
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
147513
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML
PAS 5500 / 200B
CATEGORY
Steppers & Scanners
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
147513
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
i-Line StepperConfiguration
No ConfigurationOEM Model Description
The PAS 5500/200B is the first stepper to incorporate ASML's revolutionary AERIALTM illuminator, a versatile component that provides both the flexibility to switch between conventional and off-axis illumination modes and the high intensity to enable economical mass production of next-generation devices. The i-line stepper combines 0.35 micron resolution with industry-leading overlay performance of 50nm, or 100nm in machine-to-machine matching.Documents
No documents