Overview

The PAS 5500/200B is the first stepper to incorporate ASML's revolutionary AERIALTM illuminator, a versatile component that provides both the flexibility to switch between conventional and off-axis illumination modes and the high intensity to enable economical mass production of next-generation devices. The i-line stepper combines 0.35 micron resolution with industry-leading overlay performance of 50nm, or 100nm in machine-to-machine matching.