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CANON  FPA-2000i1
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:78418

    Wafer Sizes:Unknown

    Vintage:1991

    Description

    No description available

    Configuration

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    Documents
    OEM Model Description

    The CANON FPA 2000-i1 is an advanced i-line wafer stepper that can print high-density VLSI devices with high yields. It has a printing wavelength of 365 nm, can handle wafers up to 4" in size, and has a resolution of 0.5 µm. It also features die-by-die and global leveling for wafer leveling.

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