Description

Photolithography machine Stepper

Configuration

i-line OEM: 0.5um

OEM Model Description

The CANON FPA 2000-i1 is an advanced i-line wafer stepper that can print high-density VLSI devices with high yields. It has a printing wavelength of 365 nm, can handle wafers up to 4" in size, and has a resolution of 0.5 µm. It also features die-by-die and global leveling for wafer leveling.

Documents

No documents

CANON

FPA-2000i1

Verified

Steppers & Scanners

Last Verified: 28 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

136856

Wafer Sizes:

6"/150mm

Vintage:

1994

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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