Description
Condition: very clean and completely decontaminated. No acid or corrosion is present. The tool was maintained, upgraded and serviced throughout it's life by the OEM.Configuration
CVD SYSTEM, 2 CHAMBER WSi Process DE-INSTALL DATE: FEB 2008 System was running production until shut down In elect rack: 1x Ebara TMP controller (306W), CVD Utility controller SECS/GEM: YES CE MARK: YES Main Frame MBB730 (2 x Wsix Deposition chambers) Gases: N2 (Ox) 4lmin N2 (Red) 125l/min Ar 1000 sccm WF6 10sccm ClF3 1000sccm DCS 1000sccm Other utilities:- Voltage 208V +/- 10% 60Hz 70 KVA Water 5Kgf/cm2 max Water flow 20 l/min Water temp 15-25 celcius Exhaust volume 2.1 m3/min Air 5.7 =/- 0.3 Kgf/cm3 220 l/min Earth class 3 GND islotaed Weight 2300 kg room temp 20-25 c, humidility 40-55%OEM Model Description
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TEL / TOKYO ELECTRON
MB2-730 HT-HT
Verified
CATEGORY
CVD (Metalization)
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
53589
Wafer Sizes:
8"/200mm
Vintage:
1997
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Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
MB2-730 HT-HT
Verified
CATEGORY
CVD (Metalization)
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
53589
Wafer Sizes:
8"/200mm
Vintage:
1997
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Condition: very clean and completely decontaminated. No acid or corrosion is present. The tool was maintained, upgraded and serviced throughout it's life by the OEM.Configuration
CVD SYSTEM, 2 CHAMBER WSi Process DE-INSTALL DATE: FEB 2008 System was running production until shut down In elect rack: 1x Ebara TMP controller (306W), CVD Utility controller SECS/GEM: YES CE MARK: YES Main Frame MBB730 (2 x Wsix Deposition chambers) Gases: N2 (Ox) 4lmin N2 (Red) 125l/min Ar 1000 sccm WF6 10sccm ClF3 1000sccm DCS 1000sccm Other utilities:- Voltage 208V +/- 10% 60Hz 70 KVA Water 5Kgf/cm2 max Water flow 20 l/min Water temp 15-25 celcius Exhaust volume 2.1 m3/min Air 5.7 =/- 0.3 Kgf/cm3 220 l/min Earth class 3 GND islotaed Weight 2300 kg room temp 20-25 c, humidility 40-55%OEM Model Description
None ProvidedDocuments
No documents