Description
SST531 280 50Wafer tested with DI-Water Levitronix Controller missing Details AttachedConfiguration
-Voltage 3x400V+N+PE 35A max -Dimension 2100x1087x1867mm LxWxH -3 Hetated, 2 Unheated Tanks -280er Chamber for 50 Wafers 8“ -Tank 1,2 was used for EKC 265, Tank 3,4 for IPA -Additional tank Nb. 5 for tests, equipped with a Fillvessel and Metering pump. T5 Supply by external CDA cabinet. -2xFume Sensors Bieler+Lang -5x Levitronix Pumps BSM 4.2 + LC325 -Rotor 50 Wafer for Clampshell -SECS GEMOEM Model Description
None ProvidedDocuments
SEMITOOL
SST531
CATEGORY
Spray Solvent / Acid
Last Verified: 10 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
137243
Wafer Sizes:
Unknown
Vintage:
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available