Description
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1 Etch chamber, 1 SRD Chamber 2 Heated Tanks (HF) 6 Inch clamp shell RotorOEM Model Description
The Spray Acid Tool (SAT) is a versatile tool that offers a range of cleaning, etching, and stripping capabilities. It features a multichamber design that allows for safe and economical operation in a completely closed environment. The SAT is 300mm ready, meaning it can handle wafers of that size. Some of the specific applications of the SAT include post-CMP clean, photo-resist strip, polymer removal, pre-diffusion clean, monitor wafer clean, and metal etch. These processes are essential for the preparation and maintenance of semiconductor wafers during the manufacturing process.Documents
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SEMITOOL
SAT
Verified
CATEGORY
Spray Solvent / Acid
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Installed / Running
Product ID:
106133
Wafer Sizes:
Unknown
Vintage:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SEMITOOL
SAT
CATEGORY
Spray Solvent / Acid
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Installed / Running
Product ID:
106133
Wafer Sizes:
Unknown
Vintage:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
1 Etch chamber, 1 SRD Chamber 2 Heated Tanks (HF) 6 Inch clamp shell RotorOEM Model Description
The Spray Acid Tool (SAT) is a versatile tool that offers a range of cleaning, etching, and stripping capabilities. It features a multichamber design that allows for safe and economical operation in a completely closed environment. The SAT is 300mm ready, meaning it can handle wafers of that size. Some of the specific applications of the SAT include post-CMP clean, photo-resist strip, polymer removal, pre-diffusion clean, monitor wafer clean, and metal etch. These processes are essential for the preparation and maintenance of semiconductor wafers during the manufacturing process.Documents
No documents