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    Key Item Details


    Operational Status:Installed / Running

    Product ID:96224

    Wafer Sizes:Unknown



    No description available


    -Resolution: 1,8 nm at 1kV or 0,5 nm at 30kV -Magnification: Low magnification mode: 60 to 10k x (accuracy ± 10%) High magnification mode: 800 to 2,000k x (accuracy ± 10%) -Electron source: Cold-cathode field emission type electron source -STEM option: brightfield /darkfield STEM Detector, STEM sample holder -EDX X-MAX 80 (2012) AZtec EDX Software Advanced -Point electronic DISS5 (2012) -Hitachi ZONE-TEM Desktop Sample Cleaner (2014) power is 200/208/230 VAC, Single Phase, 50/60 Hz, 4 kVA

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