Description
Hitachi SU8040 w/o EDSConfiguration
Process Type: FA SEMs/TEMs/Dual Beams Specification: Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.3nm (1kV, WD=1.5mm, Deceleration mode) Secondary electron detectors: Top, upper and lower Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 Axis Hitachi Regulus Stage Type I: X: 0 ~ 110mm; Y: 0 ~ 80mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Maximum sample size: 150mm Stage Repeatability less than +/- 0.5 microns Configuration: Operating System: Windows 7 Options: EDX, BSE, STEMOEM Model Description
the SU8040 that features a newly developed Regulus Stage. The Regulus stage has the capability that can be operated smoothly even at ultra high resolution. The Regulus stage has adopted a high reliable conventional motor drive, but the capability has been greatly improved thanks to the newly developed motor drivetrain. Now the Regulus stage can achieve seamless stage operation and high throughput observation without any stress.Documents
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HITACHI
SU8040
Verified
CATEGORY
SEM / FIB
Last Verified: 18 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
117550
Wafer Sizes:
Unknown
Vintage:
2012
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
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HITACHI
SU8040
CATEGORY
SEM / FIB
Last Verified: 18 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
117550
Wafer Sizes:
Unknown
Vintage:
2012
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Hitachi SU8040 w/o EDSConfiguration
Process Type: FA SEMs/TEMs/Dual Beams Specification: Secondary electron image resolution: 1.0nm (15kV, WD=4mm) 1.3nm (1kV, WD=1.5mm, Deceleration mode) Secondary electron detectors: Top, upper and lower Magnification: LM mode: 20 ~ 2,000X HM mode: 100 ~ 800,000X Specimen Stage: Stage Motorization: 5 Axis Hitachi Regulus Stage Type I: X: 0 ~ 110mm; Y: 0 ~ 80mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg. Maximum sample size: 150mm Stage Repeatability less than +/- 0.5 microns Configuration: Operating System: Windows 7 Options: EDX, BSE, STEMOEM Model Description
the SU8040 that features a newly developed Regulus Stage. The Regulus stage has the capability that can be operated smoothly even at ultra high resolution. The Regulus stage has adopted a high reliable conventional motor drive, but the capability has been greatly improved thanks to the newly developed motor drivetrain. Now the Regulus stage can achieve seamless stage operation and high throughput observation without any stress.Documents
No documents