Description

Premium FIB-SEM Dual Beam System

Configuration

Hitachi NB5000 Premium FIB-SEM Dual Beam System: 1. Main System: FIB Column: FIB voltage: 1–40 kV Ga ion source Maximum operable beam current: >50 nA Maximum current density: 50 A/cm² minimum 2-stage electrostatic lens system Octopole electrostatic lens system Automated motor-driven, CPU-controlled aperture system 4K × 4K pattern generator Section View function for low-kV material observation Real-time monitoring during fabrication ("Live Fabrication") Mill & Monitor (M&M) function FIB resolution: 5 nm @ 40 kV SEM Column: SEM voltage: 0.5–30 kV ZrO/W Schottky field-emission electron gun Maximum beam current: >30 nA 3-stage electromagnetic lens reduction system Electrostatic blanking system Everhart-Thornley upper detector system ET Plus lower detector system Signal mixing for SE/BSE/EB with user-controlled electron-energy detection biasing SE power supply Self-cleaning thin-film objective aperture 2560 × 1920 image memory Dual-monitor simultaneous display SEM resolution: 1.0 nm @ 15 kV Vacuum System: Turbo molecular pump: 300 L/s Dry pump, without cover: 250 L/s @ 60 Hz Dry-pump accessory kit Ion-source chamber ion pump: 20 L/s Getter pump: 100 L/s Electron-gun chamber ion pump: 30 L/s Intermediate chamber ion pump: 30 L/s Anti-vibration accessory kit Two buffer tanks 2. Pneumatic Drive Package Complete pneumatic drive package Air-driven valves for evacuation system Air compressor N₂ gas leak system N₂ gas leakage system for specimen exchange using N₂ instead of atmospheric air 1/4" tapered externally threaded joint required 3. Micro-Sampling System Hitachi patented micro-sampling system Software interface fully integrated into main GUI XYZ range: approximately 1 × 2 × 2.5 mm 3-axis motor-drive system IN/OUT air-drive system for probe evacuation IN/OUT air-drive dual GIS system Touch-detection function for added safety 4. Computer / Control System: NB5000 computer system Windows 7 Red Hat Enterprise Linux PC Dual LCD monitors with monitor stand Hi-Mouse software Mouse and keyboard SEM/FIB control panel 5. Stage / Sample Handling: Tilt Eucentric Stage: 5-axis motor-drive system Stage travel: 50 mm × 50 mm Multi-stage control panel Console control unit Power supply unit AC power distribution Transformer unit Sample Handling: Vertical-motion specimen holder Height adjustable without rotation of specimen 30 mm specimen stub Laser sample-height adjustment tool Manual sample-height adjustment tool UL/SEM compliance model Equipment interlock functions for: -Power interruption -Water shutdown -Air-pressure degradation -Vacuum degradation 6. LAN Connection Option Ethernet communication modification UNIX networking capability XP networking capability Configuration not included Ethernet accessories not included 7. Chamber Scope Compact design permitting continuous monitoring of specimen chamber 7" LCD and stand Power supply Port with screw-on cap IR camera Video/power cables AC/DC adapter Adjustment tools Auto-focus function Freeze function 8. EDS / Analysis Configuration Included: EDS kit / customized modification SE detector modification Software function added for analysis Beam-spot control by cursor, box, line, etc. EDS communication function CAD navigation option capability CAD Navigation Optical CAD navigation software is separately required Visual interface for FIB and CAD drawings Supports Astron/NASFA Corporation 9. Side-Entry Auto Stage Part No. 427-0040 4-axis motor-driven stage: X, Y, Z, and θ TEM stage for hands-free lamella transfer to TEM Side-entry stage unit Power supply Revolver mesh holder included Designed for use with Side-Entry Auto Stage Required for STEM option 10. STEM Observation Function Part No. 427-0041 Hardware: STEM imaging of films with Side-Entry Auto Stage Motorized solid-state detector Switchable Bright Field / Dark Field modes BF STEM holder included Software: STEM software function Software setup Interface for image registration and detector alignment Used in conjunction with Side-Entry Auto Stage 11. FIB Acceleration Lens Function Part No. 427-0120: Low-kV acceleration for enhanced imaging Milling at 5 kV and below Amorphous-layer removal technology installed for the ion column 12. Revolver Mesh Common Holders Part No. 428-0178: For fabrication and observation of lamellae on a mesh grid Common mesh holder used between the NB5000 Side-Entry Auto Stage and compatible Hitachi systems Used in conjunction with Side-Entry Auto Stage 13. Auto Fabrication Software Suite Part No. 427-0047: Image recognition function Automatic bottom-cut for U-samples Automatic tilt function Customizable fabrication process routines Macro/template saving Automatic stage registration for multiple locations beyond field of view Reference-mark patterns for batch processing Automatic exit function Automatically turns off HV after automatic routine completion 14. Auto Thinning Fabrication Function Part No. 427-0049: Automatic thinning of specimen for Side-Entry Stage Customizable fabrication process routines Macro/template saving Automatic stage registration for multiple locations beyond field of view Reference-mark patterns for batch processing Automatic exit function Automatic HV shutoff after automatic routine completion (Requires Auto Fabrication Software Suite.) 15. Holder Microscope & Tablet Set Part No. 427-0044: Image navigation Specimen-holder alignment captured by Micro Zoom Camera and/or tablet Tablet can be used to input a position from a paper-based image Captured images displayed on SEM GUI via capture board Allows image navigation using a photograph of the specimen holder Facilitates locating observation sites 16. CCD / Micro-Zoom Camera CCD: Capture pixel: approximately 380,000 pixels Maximum magnification: approximately 100× and 50×, depending on attachment lens White LED illumination with selectable angle Auto white balance Auto exposure Auto focus Freeze function Package includes: Micro-Zoom Camera output as NTSC video signal Coarse/fine control knob for camera focus Table stand for photographing specimen holder Video capture board installed in NB5000 main unit 50× replacement lens Standard camera configuration equipped with 100× objective lens 17. High Resolution Mill & Monitor Function Part No. 427-0135 HR M&M: Advanced segmentation imaging in semi-in-the-lens mode with ion milling Fine-pitch compensation function for image-sequencing capture Automatic EM objective-lens shutoff for FIB/SEM alternation during milling/imaging Auto-degauss function for AOI (Area of Interest) retention 18. NB5000 Cold Trap Part No. S1K03821 Dual-function LN₂ cold trap and cold finger Compatible with NB5000 cryo system Contamination-reduction technology Improves specimen-chamber vacuum LN₂ injection port Funnel Funnel support Cold-trap hardware and accessories 19. Mill & Mapping Capability / 3D EDS Function Part No. 427-0128 Advanced segmentation imaging with ion milling Fine-pitch compensation for image-sequencing capture Automatic EM objective-lens shutoff during milling/imaging Auto-degauss function for AOI retention Hitachi DiRECTcom for EDS auto-acquisition per segment EDS map resolution up to 2048 × 1600 pixels Requires EDAX TEAM software Version 3.4.1 or later Requires NB5000 PC software Version 02.60 or later 20. ST Holder BCN Part No. 427-0973 High-resolution SEM observation of bulk or mesh samples with Side-Entry Stage Designed for optimum working distance (OWD) for high-resolution SEM imaging Specimen holder capable of mounting the applicable specimen stub for Side-Entry Stage operation Applicable to FIB and FIB-SEM systems Used in conjunction with Side-Entry Auto Stage 21. Flip Holder BCN Part No. 427-0193 Backside ion milling for reducing curtaining effects Planar milling of lamella from substrate Designed for Side-Entry Auto Stage Compatible with NB5000 FIB-SEM 22. 3D Mesh Holder Part No. 427-0181 Fabrication and 360° observation of lamellae on a mesh grid Compatible with Side-Entry Stage TEM/STEM sample holder for Side-Entry Stage Observation of lamellae from front and back Backside fabrication capability Full continuous rotation in both directions in 1° increments Compatible with FIB-SEM/FIB-2xxx series and HD-2700 under specified lens configuration Used in conjunction with Side-Entry Auto Stage 23. Electron Microscope / EDAX Interface & Computer: Electron Microscope Interface: Electron microscope interface for beam-control package Stage software enables control of microscope stage: X, Y, Z, and θ axes Control through EDAX software where access controls are available from the electron microscope Column software enables reading and changing of electron-microscope column parameters through EDAX software, where supported X1 Analyzer Minimum Specification: Intel i7-2600 processor 3.4 GHz 8 MB cache 4 cores Windows 7 Ultimate 64-bit 16 GB RAM 500 GB hard drive SATA DVD writer Microsoft Office 2010 Home & Business Display: 22" widescreen flat-panel LCD monitor EDAX TEAM 3D: TEAM 3D for Hitachi TEAM 3D EDS API for Hitachi Requires a current installation of TEAM EDS with EDAX hardware