
Description
The SU-70 is used for imaging, elemental analysis and the fabrication of nanostructures by both electron beam lithography, and direct write electron beam induced depositionConfiguration
No ConfigurationOEM Model Description
Analytical UHR Schottky Emission Scanning Electron Microscope Model SU-70 is a new-concept SEM, incorporating Hitachi’s field proven semi-in-lens technology for ultra-high resolution with a Schottky electron gun. It features not only ultra-high resolution (1.0nm/15kV, 1.6nm/Kv (*)) but also reduced charge-up imaging, compositional-contrast imaging, and ultra-low voltage imaging derived from Hitachi’s highly reputed Super ExB filter technology. The Schottky electron gun enables a wide variety of analytical capabilities due to its high probe current (100nA).Documents
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SU-70
CATEGORY
SEM / FIB
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
107107
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
The SU-70 is used for imaging, elemental analysis and the fabrication of nanostructures by both electron beam lithography, and direct write electron beam induced depositionConfiguration
No ConfigurationOEM Model Description
Analytical UHR Schottky Emission Scanning Electron Microscope Model SU-70 is a new-concept SEM, incorporating Hitachi’s field proven semi-in-lens technology for ultra-high resolution with a Schottky electron gun. It features not only ultra-high resolution (1.0nm/15kV, 1.6nm/Kv (*)) but also reduced charge-up imaging, compositional-contrast imaging, and ultra-low voltage imaging derived from Hitachi’s highly reputed Super ExB filter technology. The Schottky electron gun enables a wide variety of analytical capabilities due to its high probe current (100nA).Documents
No documents