Overview

The Micrion 9800 is used primarily for circuit modification and is differentiated from the 9000 Series principally by its substrate handling capabilities. In automated circuit modification applications, x/y navigation is required to be more accurate but the workpiece does not need to be tilted. In circuit modification, however, navigation on a substrate to an accuracy of better than 0.25 microns is desired. To achieve this higher accuracy, Micrion equips such systems with x/y stages in which stage position is monitored by a laser interferometer. This type of measurement technique is the most accurate available and at the present time only Micrion FIB systems offer this feature. The handling and positioning capability of the Micrion 9800 is valuable since it permits a large number of complex modifications to be programmed and automated, eliminating operator error in making the modifications.