Description
Standalone RTP EquipmentConfiguration
No ConfigurationOEM Model Description
Modular process technology RTP-600S Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times). Quartz chamber (not included). Up to six channels of MFC control (Equipped with 3 channels). Highly uniform loop array with accurate control and monitoring. 208V, 3Ph, 60Hz, 80A.Documents
No documents
CATEGORY
RTP/RTA
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
113895
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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MODULAR PROCESS TECHNOLOGY / MPTC
RTP-600S
CATEGORY
RTP/RTA
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
113895
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Standalone RTP EquipmentConfiguration
No ConfigurationOEM Model Description
Modular process technology RTP-600S Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times). Quartz chamber (not included). Up to six channels of MFC control (Equipped with 3 channels). Highly uniform loop array with accurate control and monitoring. 208V, 3Ph, 60Hz, 80A.Documents
No documents