Description
Operational. Complete with the exception of quartzware.Configuration
No ConfigurationOEM Model Description
Modular process technology RTP-600S Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times). Quartz chamber (not included). Up to six channels of MFC control (Equipped with 3 channels). Highly uniform loop array with accurate control and monitoring. 208V, 3Ph, 60Hz, 80A.Documents
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MODULAR PROCESS TECHNOLOGY / MPTC
RTP-600S
Verified
CATEGORY
RTP/RTA
Last Verified: 7 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
116664
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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MODULAR PROCESS TECHNOLOGY / MPTC
RTP-600S
CATEGORY
RTP/RTA
Last Verified: 7 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
116664
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Operational. Complete with the exception of quartzware.Configuration
No ConfigurationOEM Model Description
Modular process technology RTP-600S Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times). Quartz chamber (not included). Up to six channels of MFC control (Equipped with 3 channels). Highly uniform loop array with accurate control and monitoring. 208V, 3Ph, 60Hz, 80A.Documents
No documents