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MATTSON / STEAG / AST 3000
    Description
    Single Chamber RTP with 3 Load/unloaders - Operational Condition
    Configuration
    RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660
    OEM Model Description
    The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.
    Documents
    File icon

    Mattson. AST3000,mov.mov

    File icon

    MattsonAST3000.mov

    File icon

    Mattson AST3000.mov

    File icon

    Mattson. AST3000.mov

    File icon

    Mattson AST3000 .mov

    File icon

    MattsonAST3000 .mov

    MATTSON / STEAG / AST

    3000

    verified-listing-icon

    Verified

    CATEGORY
    RTP/RTA

    Last Verified: Over 60 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    59225

    Wafer Sizes:

    8"/200mm

    Vintage:

    2000

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
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    verified-listing-icon
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    Last Verified: Over 60 days ago
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    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    59225

    Wafer Sizes:

    8"/200mm

    Vintage:

    2000

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Single Chamber RTP with 3 Load/unloaders - Operational Condition
    Configuration
    RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660
    OEM Model Description
    The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.
    Documents
    File icon

    Mattson. AST3000,mov.mov

    File icon

    MattsonAST3000.mov

    File icon

    Mattson AST3000.mov

    File icon

    Mattson. AST3000.mov

    File icon

    Mattson AST3000 .mov

    File icon

    MattsonAST3000 .mov

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