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MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
  • MATTSON / STEAG / AST 3000
Description
Single Chamber RTP with 3 Load/unloaders - Operational Condition
Configuration
RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660
OEM Model Description
The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.
Documents
File icon

Mattson. AST3000,mov.mov

File icon

MattsonAST3000.mov

File icon

Mattson AST3000.mov

File icon

Mattson. AST3000.mov

File icon

Mattson AST3000 .mov

File icon

MattsonAST3000 .mov

MATTSON / STEAG / AST

3000

verified-listing-icon

Verified

CATEGORY
RTP/RTA

Last Verified: Over 60 days ago

Key Item Details
Condition:

Used

Operational Status:

Unknown

Product ID:

59225

Wafer Sizes:

8"/200mm

Vintage:

2000

Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA
Vintage: 2000Condition: Used
Last VerifiedOver 60 days ago
MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA
Vintage: 2002Condition: Used
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MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

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RTP/RTA
Vintage: 0Condition: Used
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MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

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Vintage: 0Condition: Used
Last VerifiedOver 60 days ago
MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA
Vintage: 2007Condition: Used
Last VerifiedOver 60 days ago

MATTSON / STEAG / AST

3000

verified-listing-icon
Verified
CATEGORY
RTP/RTA
Last Verified: Over 60 days ago
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Key Item Details
Condition:

Used

Operational Status:

Unknown

Product ID:

59225

Wafer Sizes:

8"/200mm

Vintage:

2000

Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Single Chamber RTP with 3 Load/unloaders - Operational Condition
Configuration
RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660
OEM Model Description
The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.
Documents
File icon

Mattson. AST3000,mov.mov

File icon

MattsonAST3000.mov

File icon

Mattson AST3000.mov

File icon

Mattson. AST3000.mov

File icon

Mattson AST3000 .mov

File icon

MattsonAST3000 .mov

Similar Listings
View All
MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTAVintage: 2000Condition: UsedLast Verified:Over 60 days ago
MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTAVintage: 2002Condition: UsedLast Verified:Over 60 days ago
MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTAVintage: 0Condition: UsedLast Verified:Over 60 days ago
MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTAVintage: 0Condition: UsedLast Verified:Over 60 days ago
MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTAVintage: 2007Condition: UsedLast Verified:Over 60 days ago