Description

Missing: Robot Aligner Oxygen sensor Water flow sensors Pneumatic Rack Analog Converter for Thermocouple Blower 2 Power Supply Air distributor Faulty CPU Sequencer (main computer to run the software and communicate with facility components)

Configuration

Spare High quality (original packed parts) Quartzware Included: Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Facility documents GEM Hardware-Installation Check-Out Operation Parts Guide Process Info RTP AST3000 Service Service-Tools Supplementary Wiring (all circuit diagrams for each individual component)

OEM Model Description

The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.