Description
Missing: Robot Aligner Oxygen sensor Water flow sensors Pneumatic Rack Analog Converter for Thermocouple Blower 2 Power Supply Air distributor Faulty CPU Sequencer (main computer to run the software and communicate with facility components)Configuration
Spare High quality (original packed parts) Quartzware Included: Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Facility documents GEM Hardware-Installation Check-Out Operation Parts Guide Process Info RTP AST3000 Service Service-Tools Supplementary Wiring (all circuit diagrams for each individual component)OEM Model Description
The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.Documents
MATTSON / STEAG / AST
3000
Verified
CATEGORY
RTP/RTA
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
59880
Wafer Sizes:
8"/200mm, 12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
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Refurbishment Services
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MATTSON / STEAG / AST
3000
CATEGORY
RTP/RTA
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
59880
Wafer Sizes:
8"/200mm, 12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available