Description
Pumps and chiller not included.Configuration
System Features: PLC and touch screen control, 3" inch chuck Active substrate temperature control Vacuum Cassette ElevatorOEM Model Description
Vacuum loadlocked plasma systemDocuments
TRION
TITAN
Verified
CATEGORY
RIE
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
63718
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View AllTRION
TITAN
CATEGORY
RIE
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
63718
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available