
Description
Others Reticle handler 1 Handler System Internal Transfer Unit 1 Main System MASK INSPECTION SYSTEM 1Configuration
Software Version SL4.2.24OEM Model Description
The KLA-Tencor STARlight™ SL3UV is a product that provides comprehensive UV contamination inspection for deep ultra-violet (DUV) lithography. It assures reticle quality throughout the manufacturing process and their productive life in wafer fabrication. This is necessary due to the increased complexity of reticle manufacturing and new inspection challenges introduced by subwavelength lithography.Documents
No documents
Verified
CATEGORY
Reticle / Mask Inspection
Last Verified: Yesterday
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
144643
Wafer Sizes:
8"/200mm
Vintage:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
SL3UV URSA
CATEGORY
Reticle / Mask Inspection
Last Verified: Yesterday
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
144643
Wafer Sizes:
8"/200mm
Vintage:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Others Reticle handler 1 Handler System Internal Transfer Unit 1 Main System MASK INSPECTION SYSTEM 1Configuration
Software Version SL4.2.24OEM Model Description
The KLA-Tencor STARlight™ SL3UV is a product that provides comprehensive UV contamination inspection for deep ultra-violet (DUV) lithography. It assures reticle quality throughout the manufacturing process and their productive life in wafer fabrication. This is necessary due to the increased complexity of reticle manufacturing and new inspection challenges introduced by subwavelength lithography.Documents
No documents