Description
No descriptionConfiguration
No ConfigurationOEM Model Description
The KLA-Tencor STARlight™ SL3UV is a product that provides comprehensive UV contamination inspection for deep ultra-violet (DUV) lithography. It assures reticle quality throughout the manufacturing process and their productive life in wafer fabrication. This is necessary due to the increased complexity of reticle manufacturing and new inspection challenges introduced by subwavelength lithography.Documents
No documents
Verified
CATEGORY
Reticle / Mask Inspection
Last Verified: 14 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
146128
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
SL3UV URSA
CATEGORY
Reticle / Mask Inspection
Last Verified: 14 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
146128
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
No ConfigurationOEM Model Description
The KLA-Tencor STARlight™ SL3UV is a product that provides comprehensive UV contamination inspection for deep ultra-violet (DUV) lithography. It assures reticle quality throughout the manufacturing process and their productive life in wafer fabrication. This is necessary due to the increased complexity of reticle manufacturing and new inspection challenges introduced by subwavelength lithography.Documents
No documents