Description
Implant dose measurement systemConfiguration
No ConfigurationOEM Model Description
Therma-Wave TP-630XP has increased the repeatability of ion implantation dose measurement by a factor of four and released the application for ultra-shallow junction depth metrology.Documents
No documents
Verified
CATEGORY
Reticle / Mask Inspection
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
154303
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / THERMA-WAVE
TP-630XP
CATEGORY
Reticle / Mask Inspection
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
154303
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Implant dose measurement systemConfiguration
No ConfigurationOEM Model Description
Therma-Wave TP-630XP has increased the repeatability of ion implantation dose measurement by a factor of four and released the application for ultra-shallow junction depth metrology.Documents
No documents