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KOKUSAI-ELECTRIC (KE) DJ-1206VN-DF
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:72851

    Wafer Sizes:12"/300mm

    Vintage:2008

    Description

    MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: CX3000 Equipment status: Out of Fab Process: ALD (SiO2) Type: Diffusion Air valve: FUJIKIN Heater: D4EX22250-001 MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 480V Single phase power: 1Ø AC 208V Main/APC: CKD Gas: PN2 / O2 / O3 / Si-Source Others: ROBO 5000

    Configuration

    Process: ALD (SiO2) The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Cooling water unit - Scavenger - Temperature controller The gas subsystem includes the following major components: - Power box ( consists of the primary power supply and the power control system ) - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) - Temperature controller Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )

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