MOCVD
Last Verified:Over 60 days ago
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Last Verified:Over 60 days ago
Condition:Used
Operational Status:
Product ID:72851
Wafer Sizes:12"/300mm
Vintage:2008
MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: CX3000 Equipment status: Out of Fab Process: ALD (SiO2) Type: Diffusion Air valve: FUJIKIN Heater: D4EX22250-001 MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 480V Single phase power: 1Ø AC 208V Main/APC: CKD Gas: PN2 / O2 / O3 / Si-Source Others: ROBO 5000
Process: ALD (SiO2) The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Cooling water unit - Scavenger - Temperature controller The gas subsystem includes the following major components: - Power box ( consists of the primary power supply and the power control system ) - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) - Temperature controller Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )
None Provided
Last Verified:Over 60 days ago
Condition:Used
Operational Status:
Product ID:72851
Wafer Sizes:12"/300mm
Vintage:2008
MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: CX3000 Equipment status: Out of Fab Process: ALD (SiO2) Type: Diffusion Air valve: FUJIKIN Heater: D4EX22250-001 MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 480V Single phase power: 1Ø AC 208V Main/APC: CKD Gas: PN2 / O2 / O3 / Si-Source Others: ROBO 5000
Process: ALD (SiO2) The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Cooling water unit - Scavenger - Temperature controller The gas subsystem includes the following major components: - Power box ( consists of the primary power supply and the power control system ) - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) - Temperature controller Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )
None Provided
Moov goes beyond the transaction to ensure a seamless buying experience from start to finish.
Money Back Guarantee
Let Moov take the risk out of purchasing secondhand equipment with our 'No questions asked Money Back Guarantee' Learn more
Logistics
One stop shop for Moov-ing equipment anywhere globally.
Insurance
Moov-ing equipment can be risky. Let us take on that risk so you can relax while your equipment is in transit.
Refurbishment
Need a tool built to the required specifications? Moov's refurbishment team has over 20 years of experience.