KOKUSAI-ELECTRIC (KE)

DJ-1206VN-DF

MISSING PARTS:
(1 set) Quartz wares - process tube, etc.

Software OS: CX3000
Equipment status: Out of Fab
Process: ALD (SiRN)
Type: Diffusion
Air valve: FUJIKIN
Heater: D4EX24196-002
MFC, MFM: HORIBA STEC
Three phase power: 3Ø AC 480V
Single phase power: 1Ø AC 208V
Main/APC: CKD
Gas: PN2 / SiH2Cl2 / NH3 / 20%F2 / Si-Source					
Others: ROBO 5000

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1.png

Data.jpg

DN-150.jpg

Exhaust box.jpg

GAS BOX.jpg

Gas unit.jpg

GFC Panel.jpg

hardware switch.jpg

Main body1.jpg

Main body2.jpg

Main body3.jpg

Main body.jpg

Main body5.jpg

rcu unit.jpg

Main body4.jpg

Main body8.jpg

Main body9.jpg

n2 perge unit.jpg

Operation panel.jpg

plc control.jpg

power braker.jpg

Main body7.jpg

Main body6.jpg

temparature module.jpg

tranformer.jpg

APC controler.jpg

cooling unit.jpg

temparature controller.jpg

SCr unit.jpg

Cx5000.jpg

1.jpg

main body5.jpg

main body6.jpg

main body7.jpg

main body8.jpg

main body9.jpg

main body10.jpg

operation panel.jpg

temaparture module.jpg

apc controller.jpg

coooing unit.jpg

SCR unit.jpg

CX5000.jpg

data.jpg

temparature contoller.jpg

transformer.jpg

GFC panel.jpg

gas unit.jpg

main body3.jpg

main body4.jpg

dn 150.jpg

main body2.jpg

main body.jpg

main body1.jpg

exhaust box.jpg

GFC.jpg

Gas box.jpg

n2 purge unit.jpg

MISSING PARTS:
(1 set) Quartz wares - process tube, etc.

Software OS: CX5000
Equipment status: Out of Fab
Process: Si3N4
Type: Diffusion
Air valve: FUJIKIN
Heater: D4EX30455-003
MFC, MFM: HORIBA STEC
Three phase power: 3Ø AC 480V
Single phase power: 1Ø AC 208V
Main/APC: CKD
Gas: PN2 / SiH2Cl2 / NH3 / NF3							
Others: ROBO 5000

KE_DJ-1206VN-DF.pdf

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MISSING PARTS:
(1 set) Quartz wares - process tube, etc.

Software OS: CX3000
Equipment status: Out of Fab
Process: ALD (SiCN)
Type: Diffusion
Air valve: FUJIKIN
Heater: D4EX24196-001
MFC, MFM: HORIBA STEC
Three phase power: 3Ø AC 480V
Single phase power: 1Ø AC 208V
Main/APC: CKD
Gas: PN2 / SiH2Cl2 / 20%F2 / C3H6 / Si-Source		
Others: ROBO 5000

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MISSING PARTS:
(1 set) Quartz wares - process tube, etc.

Software OS: CX3000
Equipment status: Out of Fab
Process: ALD (SiO2)
Type: Diffusion
Air valve: FUJIKIN
Heater: D4EX22250-001
MFC, MFM: HORIBA STEC
Three phase power: 3Ø AC 480V
Single phase power: 1Ø AC 208V
Main/APC: CKD
Gas: PN2 / O2 / O3 / Si-Source			
Others: ROBO 5000

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MISSING PARTS:
(1 set) Quartz wares - process tube, etc.

Software OS: CX3000
Equipment status: Out of Fab
Process: Si3N4
Type: Diffusion
Air valve: FUJIKIN
Heater: D4EX24196-003
MFC, MFM: HORIBA STEC
Three phase power: 3Ø AC 440V
Single phase power: 1Ø AC 208V
Main/APC: CKD
Gas: PN2 / SiH2Cl2 / NH3 / NF3							
Others: ROBO 5000

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6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

DJ-1206VN-DF

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KOKUSAI-ELECTRIC (KE)

DJ-1206VN-DF

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KOKUSAI-ELECTRIC (KE)

DJ-1206VN-DF

KOKUSAI-ELECTRIC (KE)

DJ-1206VN-DF

KOKUSAI-ELECTRIC (KE)

DJ-1206VN-DF

KOKUSAI-ELECTRIC (KE)

DJ-1206VN-DF