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AIXTRON 6x2 CCS
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:66897

    Wafer Sizes:Unknown

    Vintage:Unknown

    Description

    Good for lasers, low volume production, R&D

    Configuration

    -CCS Flip Top MOCVD Reactors -GaAs 6x2"

    Documents
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    OEM Model Description

    Close Coupled Showerhead 6x2 inch Deposition system for compound semiconductors

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