Description
No descriptionConfiguration
AIXTRON CCS for GaAs Configuration: Wafer Size: 6 x 2" 2 x 4" 1 x 6" Above throughput is possible with current tool configuration. No modifications required. MO Sources: S1 Cp2Mg – 1 S2 Cp2Mg – 2 (spare) S3 TMAl S4 TMGa – 2 S5 TMGa – 1 S6 TMIn – 1 S7 TMIn – 2 (spare) Gases: 100ppm SiH4 NH3 N2 H2 PH3 (for use if converted to III-V) AsH3 (for use if converted to III-V) Installed Parts: showerhead heater Pd cell H2 purifier Epison flow sensors on TMGa and TMIn KSA MiniMOS inisitu high resolution stress monitoring instrument Alcatel glovebox pump Ebara 825 process pump Alcatel regen pump Other Equipment: LLydel chiller for 0°C to 80°C temp control for showerhead Cleansorb SC dry bed abatement systemOEM Model Description
Close Coupled Showerhead 6x2 inch Deposition system for compound semiconductorsDocuments
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AIXTRON
6x2 CCS
Verified
CATEGORY
MOCVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled / Uncrated
Product ID:
67167
Wafer Sizes:
Unknown
Vintage:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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AIXTRON
6x2 CCS
CATEGORY
MOCVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled / Uncrated
Product ID:
67167
Wafer Sizes:
Unknown
Vintage:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
AIXTRON CCS for GaAs Configuration: Wafer Size: 6 x 2" 2 x 4" 1 x 6" Above throughput is possible with current tool configuration. No modifications required. MO Sources: S1 Cp2Mg – 1 S2 Cp2Mg – 2 (spare) S3 TMAl S4 TMGa – 2 S5 TMGa – 1 S6 TMIn – 1 S7 TMIn – 2 (spare) Gases: 100ppm SiH4 NH3 N2 H2 PH3 (for use if converted to III-V) AsH3 (for use if converted to III-V) Installed Parts: showerhead heater Pd cell H2 purifier Epison flow sensors on TMGa and TMIn KSA MiniMOS inisitu high resolution stress monitoring instrument Alcatel glovebox pump Ebara 825 process pump Alcatel regen pump Other Equipment: LLydel chiller for 0°C to 80°C temp control for showerhead Cleansorb SC dry bed abatement systemOEM Model Description
Close Coupled Showerhead 6x2 inch Deposition system for compound semiconductorsDocuments
No documents