Description
same as SIV-500 but used a carrier to process 3 each 6 inch wafers. • 3-station process module (P1. P2. P3) • 5 KW pulsed DC power supply • P3 dedicated to ITO or other Transparent Conductive Films <TCF) • P3 has 02 MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry • L/L: has a roughing pump and water pump • Process chamber has a roughing pump. ·red to a turbo/water pump & a cryo pump SIV200 - Auto-Load (3) 6' wafers on 200mm x 200mm carrier - Front-end stocker holds (6) carriers - Uses Ulvac 10· cryo & 10· water pump/ turboConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
ULVAC
SIV-200
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
128840
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
same as SIV-500 but used a carrier to process 3 each 6 inch wafers. • 3-station process module (P1. P2. P3) • 5 KW pulsed DC power supply • P3 dedicated to ITO or other Transparent Conductive Films <TCF) • P3 has 02 MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry • L/L: has a roughing pump and water pump • Process chamber has a roughing pump. ·red to a turbo/water pump & a cryo pump SIV200 - Auto-Load (3) 6' wafers on 200mm x 200mm carrier - Front-end stocker holds (6) carriers - Uses Ulvac 10· cryo & 10· water pump/ turboConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents