Description
No descriptionConfiguration
Process Gas:CDA/N2/ArOEM Model Description
The MLX-3000N is a multi-chamber sputtering system that offers a flexible modular configuration with up to 5 process chambers and a random access robotic wafer transfer. It includes a unique dual pole, electromagnetic sputter source, a low damage high-rate etch-cleaning, and a new wafer heating method. These features, combined with improved process technology for R&D production, make the MLX-3000N a flexible and versatile system for various applications.Documents
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ULVAC
MLX-3000N
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
130343
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Process Gas:CDA/N2/ArOEM Model Description
The MLX-3000N is a multi-chamber sputtering system that offers a flexible modular configuration with up to 5 process chambers and a random access robotic wafer transfer. It includes a unique dual pole, electromagnetic sputter source, a low damage high-rate etch-cleaning, and a new wafer heating method. These features, combined with improved process technology for R&D production, make the MLX-3000N a flexible and versatile system for various applications.Documents
No documents