Description
NEW PROGRAMMABLE HMI/PLC SYSTEM (MENU DRIVEN WITH OPERATOR AND PROCESS ENGINEER MODES) NEW RF ETCH POWER SUPPLY WITH NEW MATCHING NETWORK REBUILT CTI 8 CRYOPUMP WITH COMPRESSOR AND LINES REBUILT DUAL STAGE MECHANICAL PUMP PROGRAMMABLE FEATURES INCLUDED: AUTOMATIC LOAD AND UNLOAD OF PARTS INTO CHAMBER POWER AND TIME SETTINGS FOR SPUTTER P/S FOR PROGRAM ON TOUCH SCREEN POWER AND TIME SETTINGS FOR ETCH P/S FOR PROGRAM ON TOUCH SCREEN MFC, CONTROL OF VACUUM LEVEL FOR PROGRAM ON TOUCH SCREEN MENU TO SELECT NUMBER OF SCANS ON EACH TARGET AND ETCH PLATFORM (SELECTABLE SEQUENCE) MENU TO REST PARTS ON ETCH PLATFORM (TO COOL BETWEEN TARGET SCANS)Configuration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
KDF / MRC
903M
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
125695
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
NEW PROGRAMMABLE HMI/PLC SYSTEM (MENU DRIVEN WITH OPERATOR AND PROCESS ENGINEER MODES) NEW RF ETCH POWER SUPPLY WITH NEW MATCHING NETWORK REBUILT CTI 8 CRYOPUMP WITH COMPRESSOR AND LINES REBUILT DUAL STAGE MECHANICAL PUMP PROGRAMMABLE FEATURES INCLUDED: AUTOMATIC LOAD AND UNLOAD OF PARTS INTO CHAMBER POWER AND TIME SETTINGS FOR SPUTTER P/S FOR PROGRAM ON TOUCH SCREEN POWER AND TIME SETTINGS FOR ETCH P/S FOR PROGRAM ON TOUCH SCREEN MFC, CONTROL OF VACUUM LEVEL FOR PROGRAM ON TOUCH SCREEN MENU TO SELECT NUMBER OF SCANS ON EACH TARGET AND ETCH PLATFORM (SELECTABLE SEQUENCE) MENU TO REST PARTS ON ETCH PLATFORM (TO COOL BETWEEN TARGET SCANS)Configuration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents