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DENTON VACUUM EXPLORER 14
    Description
    No description
    Configuration
    SYSTEM DESCRIPTIONS: DEPOSITION CHAMBER: • Chamber and control cabinet mounted to integral frame • 304L stainless steel chamber, 14” wide x 18” tall. o 100 mm Ø substrate size capability o Three magnetron capability (up to 3” target diameter). • One set of internal chamber deposition shields included. DEPOSITION CHAMBER PUMPING: • 620 l/s Turbo pump and controller. • Edwards XDS10 dry scroll pump • High vacuum, 3 position gate valve. VACUUM GAUGING AND PROCESS GAS CONTROL: • (1) Full range (Piranhi/Bayard-Alpert) gauge transmitter. • Ceramic capacitance manometer .1 torr FS • (2) Mass flow controllers with MKS controller. (Ar and N2) SPUTTER SOURCES: • (3) 2.0" diameter, internal "stalk-mount" • (3) Flex type, planar magnetron sputter sources. o (1) Direct cooled for Ti • (3) independent, electro-pneumatic cathode shutters. SPUTTER POWER SUPPLIES: • (1) Solid State DC power supply 1kW. • (1) Solid State RF power supply 300 watt. • (1) DC switch A/B select. SUBSTRATE STAGE: RF BIAS • DVI RF Bias 100 mm substrate stage assembly. • (1) Solid State RF power supply 300 watt. • 0-20 RPM. SYSTEM CONTROL AND AUTOMATION: • Color touch panel control and graphical status display • Multimode capabilities include: AUTOPUMP: automatic load-lock and chamber pumpdown to high vacuum conditions AUTOVENT: automatic load-lock and chamber venting to atmospheric pressure MANUAL: front panel operation of all pumps, valves, and installed subsystems AUTOMATIC: automatic operation of user-defined process sequences MAINTENANCE MODE software-switch selectable from MANUAL mode; permits all MANUAL MODE functionality with “soft” system valve interlocks disabled and “hard” safety interlocks operational
    OEM Model Description
    Denton Vacuum Explorer 14 Auto Turbo High Vacuum DC Sputtering System
    Documents

    No documents

    DENTON VACUUM

    EXPLORER 14

    verified-listing-icon

    Verified

    CATEGORY
    PVD / Sputtering

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    81706


    Wafer Sizes:

    Unknown


    Vintage:

    2010


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    DENTON VACUUM EXPLORER 14

    DENTON VACUUM

    EXPLORER 14

    PVD / Sputtering
    Vintage: 2010Condition: Used
    Last VerifiedOver 60 days ago

    DENTON VACUUM

    EXPLORER 14

    verified-listing-icon
    Verified
    CATEGORY
    PVD / Sputtering
    Last Verified: Over 60 days ago
    listing-photo-0c36bac32b2b47b4ab8613074a7bab82-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/0c36bac32b2b47b4ab8613074a7bab82/0ffc25d0a235457c9fc4c49b1901713f_ebd08e15e54642539c83f2b2a2bb86341201a_mw.jpeg
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    listing-photo-0c36bac32b2b47b4ab8613074a7bab82-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/0c36bac32b2b47b4ab8613074a7bab82/cb577c7468034997bbb1fcebacb114cb_675661ef77d449809241f6a9d0e6b1de_mw.jpeg
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    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    81706


    Wafer Sizes:

    Unknown


    Vintage:

    2010


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    SYSTEM DESCRIPTIONS: DEPOSITION CHAMBER: • Chamber and control cabinet mounted to integral frame • 304L stainless steel chamber, 14” wide x 18” tall. o 100 mm Ø substrate size capability o Three magnetron capability (up to 3” target diameter). • One set of internal chamber deposition shields included. DEPOSITION CHAMBER PUMPING: • 620 l/s Turbo pump and controller. • Edwards XDS10 dry scroll pump • High vacuum, 3 position gate valve. VACUUM GAUGING AND PROCESS GAS CONTROL: • (1) Full range (Piranhi/Bayard-Alpert) gauge transmitter. • Ceramic capacitance manometer .1 torr FS • (2) Mass flow controllers with MKS controller. (Ar and N2) SPUTTER SOURCES: • (3) 2.0" diameter, internal "stalk-mount" • (3) Flex type, planar magnetron sputter sources. o (1) Direct cooled for Ti • (3) independent, electro-pneumatic cathode shutters. SPUTTER POWER SUPPLIES: • (1) Solid State DC power supply 1kW. • (1) Solid State RF power supply 300 watt. • (1) DC switch A/B select. SUBSTRATE STAGE: RF BIAS • DVI RF Bias 100 mm substrate stage assembly. • (1) Solid State RF power supply 300 watt. • 0-20 RPM. SYSTEM CONTROL AND AUTOMATION: • Color touch panel control and graphical status display • Multimode capabilities include: AUTOPUMP: automatic load-lock and chamber pumpdown to high vacuum conditions AUTOVENT: automatic load-lock and chamber venting to atmospheric pressure MANUAL: front panel operation of all pumps, valves, and installed subsystems AUTOMATIC: automatic operation of user-defined process sequences MAINTENANCE MODE software-switch selectable from MANUAL mode; permits all MANUAL MODE functionality with “soft” system valve interlocks disabled and “hard” safety interlocks operational
    OEM Model Description
    Denton Vacuum Explorer 14 Auto Turbo High Vacuum DC Sputtering System
    Documents

    No documents

    Similar Listings
    View All
    DENTON VACUUM EXPLORER 14

    DENTON VACUUM

    EXPLORER 14

    PVD / SputteringVintage: 2010Condition: UsedLast Verified:Over 60 days ago