Description
No descriptionConfiguration
SYSTEM DESCRIPTIONS: DEPOSITION CHAMBER: • Chamber and control cabinet mounted to integral frame • 304L stainless steel chamber, 14” wide x 18” tall. o 100 mm Ø substrate size capability o Three magnetron capability (up to 3” target diameter). • One set of internal chamber deposition shields included. DEPOSITION CHAMBER PUMPING: • 620 l/s Turbo pump and controller. • Edwards XDS10 dry scroll pump • High vacuum, 3 position gate valve. VACUUM GAUGING AND PROCESS GAS CONTROL: • (1) Full range (Piranhi/Bayard-Alpert) gauge transmitter. • Ceramic capacitance manometer .1 torr FS • (2) Mass flow controllers with MKS controller. (Ar and N2) SPUTTER SOURCES: • (3) 2.0" diameter, internal "stalk-mount" • (3) Flex type, planar magnetron sputter sources. o (1) Direct cooled for Ti • (3) independent, electro-pneumatic cathode shutters. SPUTTER POWER SUPPLIES: • (1) Solid State DC power supply 1kW. • (1) Solid State RF power supply 300 watt. • (1) DC switch A/B select. SUBSTRATE STAGE: RF BIAS • DVI RF Bias 100 mm substrate stage assembly. • (1) Solid State RF power supply 300 watt. • 0-20 RPM. SYSTEM CONTROL AND AUTOMATION: • Color touch panel control and graphical status display • Multimode capabilities include: AUTOPUMP: automatic load-lock and chamber pumpdown to high vacuum conditions AUTOVENT: automatic load-lock and chamber venting to atmospheric pressure MANUAL: front panel operation of all pumps, valves, and installed subsystems AUTOMATIC: automatic operation of user-defined process sequences MAINTENANCE MODE software-switch selectable from MANUAL mode; permits all MANUAL MODE functionality with “soft” system valve interlocks disabled and “hard” safety interlocks operationalOEM Model Description
Denton Vacuum Explorer 14 Auto Turbo High Vacuum DC Sputtering SystemDocuments
No documents
DENTON VACUUM
EXPLORER 14
Verified
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
81706
Wafer Sizes:
Unknown
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
DENTON VACUUM
EXPLORER 14
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
81706
Wafer Sizes:
Unknown
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
SYSTEM DESCRIPTIONS: DEPOSITION CHAMBER: • Chamber and control cabinet mounted to integral frame • 304L stainless steel chamber, 14” wide x 18” tall. o 100 mm Ø substrate size capability o Three magnetron capability (up to 3” target diameter). • One set of internal chamber deposition shields included. DEPOSITION CHAMBER PUMPING: • 620 l/s Turbo pump and controller. • Edwards XDS10 dry scroll pump • High vacuum, 3 position gate valve. VACUUM GAUGING AND PROCESS GAS CONTROL: • (1) Full range (Piranhi/Bayard-Alpert) gauge transmitter. • Ceramic capacitance manometer .1 torr FS • (2) Mass flow controllers with MKS controller. (Ar and N2) SPUTTER SOURCES: • (3) 2.0" diameter, internal "stalk-mount" • (3) Flex type, planar magnetron sputter sources. o (1) Direct cooled for Ti • (3) independent, electro-pneumatic cathode shutters. SPUTTER POWER SUPPLIES: • (1) Solid State DC power supply 1kW. • (1) Solid State RF power supply 300 watt. • (1) DC switch A/B select. SUBSTRATE STAGE: RF BIAS • DVI RF Bias 100 mm substrate stage assembly. • (1) Solid State RF power supply 300 watt. • 0-20 RPM. SYSTEM CONTROL AND AUTOMATION: • Color touch panel control and graphical status display • Multimode capabilities include: AUTOPUMP: automatic load-lock and chamber pumpdown to high vacuum conditions AUTOVENT: automatic load-lock and chamber venting to atmospheric pressure MANUAL: front panel operation of all pumps, valves, and installed subsystems AUTOMATIC: automatic operation of user-defined process sequences MAINTENANCE MODE software-switch selectable from MANUAL mode; permits all MANUAL MODE functionality with “soft” system valve interlocks disabled and “hard” safety interlocks operationalOEM Model Description
Denton Vacuum Explorer 14 Auto Turbo High Vacuum DC Sputtering SystemDocuments
No documents