
Description
Denton Vacuum Explorer 14 Three Target RF and DC Sputtering System. Vacuum deposition system designed for thin film applications. All process variables are controlled by system computer via graphical user interface. System was upgraded by Denton in 2012 at the factory to include RF/DC magnetron sputtering and software update. System has three 4” diameter magnetron cathodes. Three MKS mass flow controllers for process gas input. 12-inch diameter rotating substrate carrier is heated by quartz lamp under platen. CTI cryopump with compressor and roughing pump. System has scratches on paint from shipping.Configuration
No ConfigurationOEM Model Description
Denton Vacuum Explorer 14 Auto Turbo High Vacuum DC Sputtering SystemDocuments
No documents
Verified
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
121010
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
DENTON VACUUM
EXPLORER 14
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
121010
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Denton Vacuum Explorer 14 Three Target RF and DC Sputtering System. Vacuum deposition system designed for thin film applications. All process variables are controlled by system computer via graphical user interface. System was upgraded by Denton in 2012 at the factory to include RF/DC magnetron sputtering and software update. System has three 4” diameter magnetron cathodes. Three MKS mass flow controllers for process gas input. 12-inch diameter rotating substrate carrier is heated by quartz lamp under platen. CTI cryopump with compressor and roughing pump. System has scratches on paint from shipping.Configuration
No ConfigurationOEM Model Description
Denton Vacuum Explorer 14 Auto Turbo High Vacuum DC Sputtering SystemDocuments
No documents